Air Gap Measurement between Substrates Using Confocal Technique

نویسندگان
چکیده

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Spatial resolution of confocal XRF technique using capillary optics

XRF (X-ray fluorescence) is a powerful technique for elemental analysis with a high sensitivity. The resolution is presently limited by the size of the primary excitation X-ray beam. A test-bed for confocal-type XRF has been developed to estimate the ultimate lateral resolution which could be reached in chemical mapping using this technique. A polycapillary lens is used to tightly focus the pri...

متن کامل

Food surface texture measurement using reflective confocal laser scanning microscopy.

Confocal laser scanning microscopy (CLSM) was used in the reflection mode to characterize the surface texture (roughness) of sliced food surfaces. Sandpapers with grit size between 150 and 600 were used as height references to standardize the CLSM hardware settings. Sandpaper particle sizes were verified by scanning electron microscopy (SEM). The mean amplitude (in micrometers) of surface varia...

متن کامل

3D Temperature Measurement in IC Chips using Confocal Raman Spectroscopy

We have demonstrated the feasibility of depth and surface temperature measurements in active areas of semiconductor devices using confocal Raman spectroscopy. Using micro heaters, we created a 3D temperature profile across micron size volume. We determined the temperature profile with sub-micron resolution and obtained good agreement with calculations. Theoretical uncertainty in temperature det...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Korean Journal of Optics and Photonics

سال: 2009

ISSN: 1225-6285

DOI: 10.3807/kjop.2009.20.4.207